(options)
by Bai Xu
Abstract
While the enormous potential in nanotechnology and micro-electro-mechanical systems (MEMS) has not been fully materialized, MEMS devices, with the success they already enjoyed in established high volume, commercial markets such as accelerometers, pressure sensors, inkjet print heads, and digital micro-mirrors, will aid in new miniaturized devices and systems as well as lower the costs of existing devices. This presentation will be focusing on the current topics in the development of MEMS technology.
Slides.ppt,
Streamed Video
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